Most Versatile.
Part Number: 4400141
Applications: Process chamber walls, kit parts, robot arms, slit valve openings, ESC edges, bellows, and tight spaces.
Straight.
Part Number: 4400140
Applications: Process chamber walls and floors, large kit part surfaces, cleanroom surfaces, work areas.
Straight.
Part Number: 4400706
Applications: Large areas, walls, work surfaces, FPD applications, 300mm process chambers and parts.
90° Angle.
Part Number: 4400242 & 4400708
Applications: Large areas at 90° from hand position, hard to reach areas.
Part Number: 4400716
Applications: Static readings of cavities, screw and bolt holes, hard to reach areas, roughing lines, small ports, any orifice larger than 5/8" (.625).
Part Number: 4401501
Applications: Specifically designed for the interior of gas injection tubes, and small gas lines, and any orifice larger than 3/10" (.30).
Available in 3 sizes (65mm pictured).
Part Number:
65mm = 4400712
150mm = 4400515
200mm = 4401480
Applications: Designed for 64mm (hard disk), 150mm, and 200mm wafer cassettes.
Part Number: 4401514
Applications: Specifically designed for the single Novellus top gas injector.
