Products

Chamber Services

Technical Site Services

Slide backgroundQIII SM Surface Particle Detector
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Slide backgroundQIII SM - Surface Particle Detector

The QIII Surface Metric - QIII SM, uses an advanced, patented interface to re-suspend particulate from the surface and draw them through a particle detector.

Use the QIII SM to find and eliminate the particles that cost you time and money.

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Slide backgroundQIII ST - Surface Particle Detector

Redefine productivity.

Pentagon Technologies’ line of surface particle detectors are the standard in high technology industries for measuring and controlling surface contamination.

  • Instant measurements of surface particulate
  • Improve yield by reducing particles
  • Particle sensitivity range: 0.1um - 5um

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Slide backgroundQIII SX - Surface Particle Detector

Pentagon Technologies’ line of surface particle detectors are the standard in high technology industries for measuring and controlling surface contamination.

The QIII SX measures particles in the sub visible to visible range (5-125um).

Use the QIII SX to find and eliminate particles that cost you time and money.

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Fan Filter Units

Pentagon Technologies designs and builds customized units for every type of environment.

We begin by consulting with each client to determine their needs and understand their issues. Our team will create an initial design that meets your environment and airflow management specifications.

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Unmatched clean solutions for all OEM process tools.

Our innovative technologies can redefine productivity. As technology moves the industry into ever-shrinking geometries, and a more competitive environment, we deliver innovations that reduce cost and increase productivity.

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Unmatched clean solutions for all OEM process tools.

Our innovative technologies can redefine productivity. As technology moves the industry into ever-shrinking geometries, and a more competitive environment, we deliver innovations that reduce cost and increase productivity.

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Pentagon Kit Management™ is a comprehensive PM program that integrates cleaning, coatings, repairs, part replacement, shipping, and logistics into a ready-to-install PM Chamber Kit.

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WELCOME TO PENTAGON

“Study the properties of water, master them, and we will create an environment in which nature and humanity are in harmony.”

Our vision inspired us to pioneer “new value for water” to contribute to the realization of a sustainable society.

As part of the Kurita Group, one of the leading industrial water solutions providers in the world, Pentagon Technologies multi-division organization offers unparalleled solutions for a wide variety of critical environment customers. We develop innovative products and services that improve the productivity and utilization of semiconductor manufacturing equipment. Since 1998, we have set the industry standard for process chamber and cleanroom operation. Pentagons technical site services group offers highly skilled professionals for the contamination controlled industry. Our engineers, researchers and technicians provide unmatched products and services for semiconductor, sterile compounding, biotechnology, solar, LED fabs, and many others around the world. Pentagon Technologies has the solution for you, providing excellence and precision every time.

NEWS & EVENTS

Pentagon Technologies Makes Strategic Move to Expand Into Asia Market

HAYWARD, Calif., October 18, 2018 -- Pentagon Technologies, Inc., a leading provider of ultra-high purity cleaning, contamination detection, coating products and services to the semiconductor, pharmaceutical, microelectronic, and solar industries, entered into a strategic partnership with Kurita Water Industries, Ltd. of Japan. The relationship is intended to provide Pentagon access to Asian markets and Kuritec Service Ltd., the tool cleaning business of the Kurita Group, enhanced ultra-high purity cleaning and coating technology from Pentagon.

Pentagon Technologies introduces QIII series for submicron to visible surface particle detection.

Pentagon Technologies surface particle detectors are the standard in high technology industries for measuring and controlling surface contamination. Particles that accumulate on critical surfaces or products can reduce yield and reliability. To achieve optimal performance in particle sensitive manufacturing it is important to have a quantified metric for surface contamination. Pentagon launched new QIII S series of products with better performance and functions in late 2022: The QIII Surface Technology - QIII ST for detecting 0.1 to 5 microns range of particles; The QIII Surface Metric - QIII SM for 0.3 to 10 microns; The Surface eXtra Large – QIII SX for 5 to 125 microns particles. Use the QIII Ss products to find and eliminate the particles that cost time and money in semiconductor wafer and equipment manufacturing, advanced wafer packaging, pharmaceutical industry, parts cleaning, etc.

Pentagon introduces innovative eClean® process.

eClean® is an enabling clean technology which greatly improves kit cost of ownership, kit performance, and environmental footprint.

eClean

Clean Air Airborne: Protection & Comfort!

There are many contaminates in the air we breathe that can be hazardous to your health. People who are at risk of exposure, can now isolate themselves from these harmful airborne risks.