Unmatched clean solutions for all OEM process tools.

Our innovative technologies can redefine productivity. As technology moves the industry into ever-shrinking geometries, and a more competitive environment, we deliver innovations that reduce cost and increase productivity.

  • Al TWAS
  • Ultra TWAS for high stress films
  • Cu TWAS
  • Alumina ceramic
  • Yttria ceramic
  • Yttria Blend ceramic
  • Ultra Yttria ceramic

Improving Process Stability.

Pentagon Kit Managementâ„¢ is a comprehensive PM program that integrates cleaning, coatings, repairs, part replacement, shipping, and logistics into a ready-to-install PM Chamber Kit.

  • Valving
  • Lid Assemblies
  • Cold traps
  • Ion Implant line assemblies
  • Process kits, such as DPS, IMP, and Encore

eClean® is an enabling clean technology which greatly improves kit cost of ownership, kit performance, and environmental footprint.