Pentagon Technologies’ QIII surface particle detectors are the standard in semiconductor, display, life-science, OLED, Optics, Hard drive and MEMS markets. The QIII can help eliminate particulate contamination on critical surfaces and improve yield, throughput and product quality.


Pentagon Technologies designs and builds customized units for every type of environment.

We begin by consulting with each client to determine their needs and understand their issues. Our team will create an initial design that meets your environment and airflow management specifications.