Unmatched clean solutions for all OEM process tools.
Our innovative technologies can redefine productivity. As technology moves the industry into ever-shrinking geometries, and a more competitive environment, we deliver innovations that reduce cost and increase productivity.
- Al TWAS
- Ultra TWAS for high stress films
- Cu TWAS
- SS TWAS
- Alumina ceramic
- Yttria ceramic
- Yttria Blend ceramic
- Ultra Yttria ceramic
Improving Process Stability.
Pentagon Kit Management™ is a comprehensive PM program that integrates cleaning, coatings, repairs, part replacement, shipping, and logistics into a ready-to-install PM Chamber Kit.
- Valving
- Lid Assemblies
- Cold traps
- Ion Implant line assemblies
- Process kits, such as DPS, IMP, and Encore
eClean® is an enabling clean technology which greatly improves kit cost of ownership, kit performance, and environmental footprint.
