Ultra Kits

Improving Process Stability.

Pentagon Kit Management™ is a comprehensive PM program that integrates cleaning, coatings, repairs, part replacement, shipping, and logistics into a ready-to-install PM Chamber Kit.

All kits are completely customizable and create PM predictability while improving process stability. Pentagon Kit Management™ will enable you to realize your goals – less cost and more productivity – while allowing you to focus on what you do best.


Ultra Kits


  • Reduced fab labor
  • Reduced fab inventory
  • Reduced cost-of-ownership
  • Increased MTBC
  • Improved green-to-green
  • Guaranteed kit predictability
  • Guaranteed kit inventory
  • Guaranteed FFF
  • Lean solution

Tools Supported:

  • 150mm / 200mm / 300mm
  • PVD / CVD / Etch
  • Most OEMs



Pentagon Ultra Kits:

Taking our kit management program one step further is our series of Ultra Kits. Introduced in 2004, these highly engineered kits extend MTBC by 2x-4x and reduce particles by 1/2 or more. Please contact us for more information.