Improving Process Stability.
Pentagon Kit Management™ is a comprehensive PM program that integrates cleaning, coatings, repairs, part replacement, shipping, and logistics into a ready-to-install PM Chamber Kit.
All kits are completely customizable and create PM predictability while improving process stability. Pentagon Kit Management™ will enable you to realize your goals – less cost and more productivity – while allowing you to focus on what you do best.
Benefits
- Reduced fab labor
- Reduced fab inventory
- Reduced cost-of-ownership
- Increased MTBC
- Improved green-to-green
- Guaranteed kit predictability
- Guaranteed kit inventory
- Guaranteed FFF
- Lean solution
Tools Supported:
- 150mm / 200mm / 300mm
- PVD / CVD / Etch
- Most OEMs
Gallery
Pentagon Ultra Kits:
Taking our kit management program one step further is our series of Ultra Kits. Introduced in 2004, these highly engineered kits extend MTBC by 2x-4x and reduce particles by 1/2 or more. Please contact us for more information.
