eClean Process Kit Cleaning

eClean® is an enabling cleaning technology which greatly improves kit cost of ownership, kit performance, and environmental footprint. Our eClean® services remove contamination and deposits from the surfaces of thin film deposition equipment and enables high yield reclamation of the removed solids. eClean® services are fully automated and offer consistent, repeatable results for cleaning chamber components cycle-to-cycle.

Ultra Kits


  • Reduce or eliminate part wear related to standard cleaning
  • Eliminate dimensional performance issues related to standard cleaning
  • Spares cost reduction by 50% or more
  • Measureable increase in kit performance
  • 150mm – 450mm capable
  • Supports green initiatives of end users
  • Substantial reduction of chemistry, related emissions, and water usage
  • Qualified on multiple thin film processes down to 22nm