eClean® is an enabling cleaning technology which greatly improves kit cost of ownership, kit performance, and environmental footprint. Our eClean® services remove contamination and deposits from the surfaces of thin film deposition equipment and enables high yield reclamation of the removed solids. eClean® services are fully automated and offer consistent, repeatable results for cleaning chamber components cycle-to-cycle.
Features:
- Reduce or eliminate part wear related to standard cleaning
- Eliminate dimensional performance issues related to standard cleaning
- Spares cost reduction by 50% or more
- Measureable increase in kit performance
- 150mm – 450mm capable
- Supports green initiatives of end users
- Substantial reduction of chemistry, related emissions, and water usage
- Qualified on multiple thin film processes down to 22nm
Gallery
