QIII Ultra

Predictable, first time tool recovery,
every time.


The industry standard for measuring and controlling surface particle contamination just got better.


  • Increase MTBC by 4x or more.
  • Tool availability Increase by 10%+
  • Reduce PM cycle time.
  • Reduce troubleshooting events.
  • ISO-14644-9 surface particle compliance.

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Shield Systems

The shield system you use must create confidence.


Whether protecting your product or your employees, the system must be reliable, and able to handle the most demanding environments. It must also allow the wearer to perform precision movements over long periods of time without becoming uncomfortable.


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QIII Max

Predictable, first time tool recovery,
every time.


The industry standard for measuring and controlling surface particle contamination just got better.


  • Increase MTBC by 4x or more.
  • Tool availability Increase by 10%+
  • Reduce PM cycle time.
  • Reduce troubleshooting events.
  • ISO-14644-9 surface particle compliance.

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Fan Filter Units

Pentagon Technologies designs and builds customized units for every type of environment.


We begin by consulting with each client to determine their needs and understand their issues. Our team will create an initial design that meets your environment and airflow management specifications.


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Unmatched clean solutions for all OEM process tools.

Our innovative technologies can redefine productivity. As technology moves the industry into ever-shrinking geometries, and a more competitive environment, we deliver innovations that reduce cost and increase productivity.



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Unmatched clean solutions for all OEM process tools.

Our innovative technologies can redefine productivity. As technology moves the industry into ever-shrinking geometries, and a more competitive environment, we deliver innovations that reduce cost and increase productivity.



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Pentagon Kit Management™ is a comprehensive PM program that integrates cleaning, coatings, repairs, part replacement, shipping, and logistics into a ready-to-install PM Chamber Kit.



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WELCOME TO PENTAGON

We develop innovative products and services that improve the productivity and utilization of semiconductor manufacturing equipment. For fifteen years, we have set the industry standard for process chamber and cleanroom operation. Our engineers, researchers and technicians provide unmatched products and services for semiconductor, solar, and LED fabs around the world.

NEWS & EVENTS